DIRECTload
Free access for wafers!
DIRECTloadFB–automatic
loading and unloading
of loadports with 300mm wafer FOUP
DIRECTloadFB – integrated FOUP lift
DIRECTloadFB – usually adapted to customs requirements
specifications: model for AMAT CENTURA
dimensions: 1800 x 600 x 2600 (mm)
weight: 450 kg
integrated lift: 1300 mm
robot handling area: ±510 mm
handling time: 30 s (adjustable), including
taking over from OHT, handing
over to loadport or buffer
operation: fully automatic
FOUP Buffer
